@misc{indiciae5c4caf7b02bb,
  title = {Stackable multi-port gas nozzles},
  author = {Poppe, Steve and Rozenzon, Yan and Ding, Peijun},
  year = {2015},
  url = {https://www.osti.gov/biblio/1171700},
  note = {Source identifier: 1171700}
}