@misc{indiciae0b975f1f104f,
  title = {Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction},
  author = {Tauke-Pedretti, Anna and Nielson, Gregory N and Cederberg, Jeffrey G and Cruz-Campa, Jose Luis},
  year = {2015},
  url = {https://www.osti.gov/biblio/1179228},
  note = {Source identifier: 1179228}
}