@misc{indiciae0f462fefdd2b,
  title = {Semiconductor devices having a recessed electrode structure},
  author = {Palacios, Tomas Apostol and Lu, Bin and Matioli, Elison de Nazareth},
  year = {2015},
  url = {https://www.osti.gov/biblio/1182571},
  note = {Source identifier: 1182571}
}