@misc{indiciae33db92901fc2,
  title = {Microfabrication Capabilities \& Device Architectures},
  author = {Bauer, Todd and Jones, Adam and Lentine, Anthony and Mudrick, John and Okandan, Murat and Rodrigues, Arun},
  year = {2015},
  doi = {10.2172/1184366},
  url = {https://www.osti.gov/biblio/1184366},
  note = {Source identifier: 1184366}
}