@misc{indiciaefcc342d73d4d,
  title = {Coaxial Lithography},
  author = {Ozel, Tuncay and Bourret, Gilles R and Mirkin, Chad A.},
  year = {2015},
  doi = {10.1038/nnano.2015.33},
  url = {https://www.osti.gov/biblio/1210757},
  note = {Source identifier: 1210757}
}