@misc{indiciae9bf5ed7fd67b,
  title = {A MEMS lamination technology based on sequential multilayer electrodeposition},
  author = {Kim, M and Kim, J and Herrault, F and Schafer, R and Allen, MG},
  year = {2013},
  doi = {10.1088/0960-1317/23/9/095011},
  url = {https://www.osti.gov/biblio/1211378},
  note = {Source identifier: 1211378}
}