@misc{indiciaef1f6c1decb86,
  title = {First Principle Simulation of Diffraction based Metrology Techniques},
  author = {Sohail, S. and Naqvi, S. Sohail H. and McNeil, John R. and Krukar, Richard and Franco, Paulo R.G. and Leland, Robert W. and Bishop, Ken P.},
  year = {2015},
  doi = {10.2172/1227984},
  url = {https://www.osti.gov/biblio/1227984},
  note = {Source identifier: 1227984}
}