TY  - RPRT
TI  - First Principle Simulation of Diffraction based Metrology Techniques
AU  - Sohail, S.
AU  - Naqvi, S. Sohail H.
AU  - McNeil, John R.
AU  - Krukar, Richard
AU  - Franco, Paulo R.G.
AU  - Leland, Robert W.
AU  - Bishop, Ken P.
PY  - 2015
DO  - 10.2172/1227984
UR  - https://www.osti.gov/biblio/1227984
ID  - 1227984
ER  -