@misc{indiciaebd5a52d712b6,
  title = {Micro electro-mechanical heater},
  author = {Oh, Yunje and Asif, Syed Amanulla Syed and Cyrankowski, Edward and Warren, Oden Lee},
  year = {2016},
  url = {https://www.osti.gov/biblio/1247996},
  note = {Source identifier: 1247996}
}