@misc{indiciae173c7c163b5e,
  title = {Device Level 3-D Integrated Circuits.},
  author = {Burckel, David Bruce and Resnick, Paul J. and Draper, Bruce L. and Finnegan, Patrick Sean and Davids, Paul},
  year = {2015},
  url = {https://www.osti.gov/biblio/1257565},
  note = {Source identifier: 1257565}
}