@misc{indiciaeeb2684413c86,
  title = {Low temperature deep reactive ion etching :},
  author = {Fishgrab, Kira L and Young, Travis Ryan and Wiwi, Michael and Shul, Randy John and Clevenger, Jascinda},
  year = {2011},
  url = {https://www.osti.gov/biblio/1288865},
  note = {Source identifier: 1288865}
}