@misc{indiciaebbf7045a18ef,
  title = {Fabrication method for small-scale structures with non-planar features},
  author = {Burckel, David Bruce and Ten Eyck, Gregory A.},
  year = {2016},
  url = {https://www.osti.gov/biblio/1325765},
  note = {Source identifier: 1325765}
}