@misc{indiciae0cc03b691dac,
  title = {Device level 3D-ICs Through Membrane Projected Lithography Using CMOS Compatible Materials.},
  author = {Finnegan, Patrick Sean and Burckel, David Bruce},
  year = {2015},
  url = {https://www.osti.gov/biblio/1327873},
  note = {Source identifier: 1327873}
}