@misc{indiciae11bd1078890f, title = {Silicon force sensor and method of using the same}, author = {Galambos, Paul C. and Crenshaw, Thomas B. and Nishida, Erik E. and Burnett, Damon J. and Lantz, Jeffrey W.}, year = {2016}, url = {https://www.osti.gov/biblio/1327919}, note = {Source identifier: 1327919} }