TY  - RPRT
TI  - Silicon force sensor and method of using the same
AU  - Galambos, Paul C.
AU  - Crenshaw, Thomas B.
AU  - Nishida, Erik E.
AU  - Burnett, Damon J.
AU  - Lantz, Jeffrey W.
PY  - 2016
UR  - https://www.osti.gov/biblio/1327919
ID  - 1327919
ER  -