@misc{indiciae13471a321774,
  title = {Methods for dry etching semiconductor devices},
  author = {Bauer, Todd and Gross, Andrew John and Clews, Peggy J. and Olsson, Roy H.},
  year = {2016},
  url = {https://www.osti.gov/biblio/1330708},
  note = {Source identifier: 1330708}
}