TY  - RPRT
TI  - Methods for dry etching semiconductor devices
AU  - Bauer, Todd
AU  - Gross, Andrew John
AU  - Clews, Peggy J.
AU  - Olsson, Roy H.
PY  - 2016
UR  - https://www.osti.gov/biblio/1330708
ID  - 1330708
ER  -