@misc{indiciae96df9f2d774d,
  title = {Semiconductor structure and recess formation etch technique},
  author = {Lu, Bin and Sun, Min and Palacios, Tomas Apostol},
  year = {2017},
  url = {https://www.osti.gov/biblio/1343744},
  note = {Source identifier: 1343744}
}