@misc{indiciae4ccdc616242a,
  title = {Method and system for continuous atomic layer deposition},
  author = {Elam, Jeffrey W. and Yanguas-Gil, Angel and Libera, Joseph A.},
  year = {2017},
  url = {https://www.osti.gov/biblio/1347583},
  note = {Source identifier: 1347583}
}