@misc{indiciae3f154876acab,
  title = {A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array},
  author = {Hopkins, Jonathan B. and Panas, Robert M. and Song, Yuanping and White, Carolyn D.},
  year = {2016},
  doi = {10.1109/jmems.2016.2628723},
  url = {https://www.osti.gov/biblio/1349012},
  note = {Source identifier: 1349012}
}