TY  - RPRT
TI  - A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array
AU  - Hopkins, Jonathan B.
AU  - Panas, Robert M.
AU  - Song, Yuanping
AU  - White, Carolyn D.
PY  - 2016
DO  - 10.1109/jmems.2016.2628723
UR  - https://www.osti.gov/biblio/1349012
ID  - 1349012
ER  -