@misc{indiciae62cfdf68e001,
  title = {In-Plane Multimagnetron Approach},
  author = {Johnson, Grant E. and Laskin, Julia},
  year = {2017},
  doi = {10.1002/9783527698417.ch5},
  url = {https://www.osti.gov/biblio/1349169},
  note = {Source identifier: 1349169}
}