TY  - RPRT
TI  - In-Plane Multimagnetron Approach
AU  - Johnson, Grant E.
AU  - Laskin, Julia
PY  - 2017
DO  - 10.1002/9783527698417.ch5
UR  - https://www.osti.gov/biblio/1349169
ID  - 1349169
ER  -