TY  - RPRT
TI  - Sequential infiltration synthesis for advanced lithography
AU  - Darling, Seth B.
AU  - Elam, Jeffrey W.
AU  - Tseng, Yu-Chih
AU  - Peng, Qing
PY  - 2015
UR  - https://www.osti.gov/biblio/1350952
ID  - 1350952
ER  -