@misc{indiciaefbcf3125793b,
  title = {Capacitance reduction for pillar structured devices},
  author = {Shao, Qinghui and Conway, Adam and Nikolic, Rebecca J. and Voss, Lars and Bhat, Ishwara B. and Harrison, Sara E.},
  year = {2017},
  url = {https://www.osti.gov/biblio/1356227},
  note = {Source identifier: 1356227}
}