TY  - RPRT
TI  - Capacitance reduction for pillar structured devices
AU  - Shao, Qinghui
AU  - Conway, Adam
AU  - Nikolic, Rebecca J.
AU  - Voss, Lars
AU  - Bhat, Ishwara B.
AU  - Harrison, Sara E.
PY  - 2017
UR  - https://www.osti.gov/biblio/1356227
ID  - 1356227
ER  -