@misc{indiciaea9bba8beee26,
  title = {Sequential infiltration synthesis for enhancing multiple-patterning lithography},
  author = {Darling, Seth B. and Elam, Jeffrey W. and Tseng, Yu-Chih},
  year = {2017},
  url = {https://www.osti.gov/biblio/1364432},
  note = {Source identifier: 1364432}
}