@misc{indiciae6f02673a4929,
  title = {3D-ICs Created Using Oblique Processing.},
  author = {Burckel, David Bruce and Resnick, Paul J. and Davids, Paul and Draper, Bruce L.},
  year = {2016},
  url = {https://www.osti.gov/biblio/1365136},
  note = {Source identifier: 1365136}
}