@misc{indiciaeacc5e773a95a,
  title = {Scanning Tunneling Lithography Toolset.},
  author = {Ward, Daniel Robert and Misra, Shashank and Scrymgeour, David and Simonson, Robert J. and Marshall, Michael Thomas and Koepke, Justin and Bussmann, Ezra and Carroll, Malcolm S. and Ballard, Josh and Owen, James and Schmucker, Scott and Fuchs, Udi and Pryadkin, Swegiy and Randall, John},
  year = {2016},
  url = {https://www.osti.gov/biblio/1368983},
  note = {Source identifier: 1368983}
}