@misc{indiciae1d3c853b3b9f,
  title = {Dry etch method for texturing silicon and device},
  author = {Gershon, Talia S. and Haight, Richard A. and Kim, Jeehwan and Lee, Yun Seog},
  year = {2017},
  url = {https://www.osti.gov/biblio/1372649},
  note = {Source identifier: 1372649}
}