@misc{indiciae0d84f6234dff,
  title = {Predicting synergy in atomic layer etching},
  author = {Kanarik, Keren J. and Tan, Samantha and Yang, Wenbing and Kim, Taeseung and Lill, Thorsten and Kabansky, Alexander and Hudson, Eric A. and Ohba, Tomihito and Nojiri, Kazuo and Yu, Jengyi and Wise, Rich and Berry, Ivan L. and Pan, Yang and Marks, Jeffrey and Gottscho, Richard A.},
  year = {2017},
  doi = {10.1116/1.4979019},
  url = {https://www.osti.gov/biblio/1376399},
  note = {Source identifier: 1376399}
}