@misc{indiciae98b957260faa,
  title = {Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)},
  author = {Anders, André},
  year = {2017},
  doi = {10.1063/1.4978350},
  url = {https://www.osti.gov/biblio/1379841},
  note = {Source identifier: 1379841}
}