@misc{indiciae3e3d049be834,
  title = {Controlled Dopant Distribution and Higher Doping Efficiencies by Surface-Functionalized Atomic Layer Deposition},
  author = {Yanguas-Gil, Angel and Peterson, Kyle E. and Elam, Jeffrey W.},
  year = {2011},
  doi = {10.1021/cm2014576},
  url = {https://www.osti.gov/biblio/1382825},
  note = {Source identifier: 1382825}
}