TY  - RPRT
TI  - Controlled Dopant Distribution and Higher Doping Efficiencies by Surface-Functionalized Atomic Layer Deposition
AU  - Yanguas-Gil, Angel
AU  - Peterson, Kyle E.
AU  - Elam, Jeffrey W.
PY  - 2011
DO  - 10.1021/cm2014576
UR  - https://www.osti.gov/biblio/1382825
ID  - 1382825
ER  -