@misc{indiciae0d38ab398b93,
  title = {Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis},
  author = {Tseng, Yu-Chih and Peng, Qing and Ocola, Leonidas E. and Elam, Jeffrey W. and Darling, Seth B.},
  year = {2011},
  doi = {10.1021/jp205532e},
  url = {https://www.osti.gov/biblio/1387739},
  note = {Source identifier: 1387739}
}