TY  - RPRT
TI  - Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
AU  - Tseng, Yu-Chih
AU  - Peng, Qing
AU  - Ocola, Leonidas E.
AU  - Elam, Jeffrey W.
AU  - Darling, Seth B.
PY  - 2011
DO  - 10.1021/jp205532e
UR  - https://www.osti.gov/biblio/1387739
ID  - 1387739
ER  -