@misc{indiciae82d9c56fd062,
  title = {Sequential infiltration synthesis for advanced lithography},
  author = {Darling, Seth B. and Elam, Jeffrey W. and Tseng, Yu-Chih and Peng, Qing},
  year = {2017},
  url = {https://www.osti.gov/biblio/1398972},
  note = {Source identifier: 1398972}
}