@misc{indiciaecb9d0b60c493,
  title = {High throughput semiconductor deposition system},
  author = {Young, David L. and Ptak, Aaron Joseph and Kuech, Thomas F. and Schulte, Kevin and Simon, John D.},
  year = {2017},
  url = {https://www.osti.gov/biblio/1409831},
  note = {Source identifier: 1409831}
}