@misc{indiciaec4d7c732df5c,
  title = {Coated substrate apparatus and method},
  author = {Bao, Zhenan and Diao, Ying and Mannsfeld, Stefan Christian Bernhardt and Tee, Chee-Keong and Becerril-Garcia, Hector A. and Zhou, Yan},
  year = {2018},
  url = {https://www.osti.gov/biblio/1416353},
  note = {Source identifier: 1416353}
}