@misc{indiciae5c7ea8b1bde7,
  title = {Pattern-generation and pattern-transfer for single-digit nano devices},
  author = {Rangelow, Ivo W. and Ahmad, Ahmad and Ivanov, Tzvetan and Kaestner, Marcus and Krivoshapkina, Yana and Angelov, Tihomir and Lenk, Steve and Lenk, Claudia and Ishchuk, Valentyn and Hofmann, Martin and Nechepurenko, Diana and Atanasov, Ivaylo and Volland, Burkhard and Guliyev, Elshad and Durrani, Zahid and Jones, Mervyn and Wang, Chen and Liu, Dixi and Reum, Alexander and Holz, Mathias and Nikolov, Nikolay and Majstrzyk, Wojciech and Gotszalk, Teodor and Staaks, Daniel and Dallorto, Stefano and Olynick, Deirdre L.},
  year = {2016},
  doi = {10.1116/1.4966556},
  url = {https://www.osti.gov/biblio/1421235},
  note = {Source identifier: 1421235}
}