@misc{indiciae4bfe714e8047,
  title = {Metal-assisted etch combined with regularizing etch},
  author = {Yim, Joanne and Miller, Jeff and Jura, Michael and Black, Marcie R. and Forziati, Joanne and Murphy, Brian and Magliozzi, Lauren},
  year = {2018},
  url = {https://www.osti.gov/biblio/1424402},
  note = {Source identifier: 1424402}
}