@misc{indiciae96d1fd12cd39,
  title = {Implementing inverted master-slave 3D semiconductor stack},
  author = {Coteus, Paul W. and Hall, Shawn A. and Takken, Todd E.},
  year = {2018},
  url = {https://www.osti.gov/biblio/1473665},
  note = {Source identifier: 1473665}
}