@misc{indiciae2c91616e8b42,
  title = {Microstructure Evolution and Implications for Cu Nanointerconnects and Beyond},
  author = {Spinella, Laura and Hu, Szu-Tung and Cao, Linjun and Ho, Paul S.},
  year = {2018},
  doi = {10.1109/iitc.2018.8430393},
  url = {https://www.osti.gov/biblio/1475113},
  note = {Source identifier: 1475113}
}