TY  - RPRT
TI  - Microstructure Evolution and Implications for Cu Nanointerconnects and Beyond
AU  - Spinella, Laura
AU  - Hu, Szu-Tung
AU  - Cao, Linjun
AU  - Ho, Paul S.
PY  - 2018
DO  - 10.1109/iitc.2018.8430393
UR  - https://www.osti.gov/biblio/1475113
ID  - 1475113
ER  -