@misc{indiciaedf9c7ee8d233,
  title = {Lithographic patterning},
  author = {Black, Charles Thomas and Stein, Aaron and Wright, Gwen and Yager, Kevin G.},
  year = {2018},
  url = {https://www.osti.gov/biblio/1493607},
  note = {Source identifier: 1493607}
}