@misc{indiciae8d8739ca4ace,
  title = {Vertically integrated optoelectronics package for MEMS devices},
  author = {Homeijer, Brian D. and Eichenfield, Matt},
  year = {2018},
  url = {https://www.osti.gov/biblio/1495213},
  note = {Source identifier: 1495213}
}