@misc{indiciae70403685d9a5,
  title = {CMOS compatible processing for phosphorous delta-layer nanoscale electronics.},
  author = {Campbell, DeAnna Marie and Marshall, Michael Thomas and Maurer, Leon and Koepke, Justin and Lu, Tzu-Ming and Ward, Daniel Robert and Misra, Shashank},
  year = {2018},
  url = {https://www.osti.gov/biblio/1501971},
  note = {Source identifier: 1501971}
}