@misc{indiciae535131ba0c53,
  title = {Progress Towards CMOS Compatible Atomic-Precision Fabrication.},
  author = {Ward, Daniel Robert and Campbell, DeAnna Marie and Marshall, Michael Thomas and Maurer, Leon and Koepke, Justin and Lu, Tzu-Ming and Misra, Shashank},
  year = {2018},
  url = {https://www.osti.gov/biblio/1510378},
  note = {Source identifier: 1510378}
}