@misc{indiciae6e884f1c642d,
  title = {Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures},
  author = {Son, Jangyup and Kwon, Junyoung and Kim, SunPhil and Lv, Yinchuan and Yu, Jaehyung and Lee, Jong-Young and Ryu, Huije and Watanabe, Kenji and Taniguchi, Takashi and Garrido-Menacho, Rita and Mason, Nadya and Ertekin, Elif and Huang, Pinshane Y. and Lee, Gwan-Hyoung and M. van der Zande, Arend},
  year = {2018},
  doi = {10.1038/s41467-018-06524-3},
  url = {https://www.osti.gov/biblio/1511448},
  note = {Source identifier: 1511448}
}