@misc{indiciaecab0c14cd2c1,
  title = {Method for simultaneous modification of multiple semiconductor device features},
  author = {Shul, Randy J. and Sniegowski, Jeffry J. and Larson, Kurt W. and Zortman, William A.},
  year = {2019},
  url = {https://www.osti.gov/biblio/1524991},
  note = {Source identifier: 1524991}
}